The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2003
Filed:
Aug. 23, 2000
Hidetoshi Nishiyama, Fujisawa, JP;
Minori Noguchi, Mitsukaido, JP;
Yoshimasa Ohshima, Yokohama, JP;
Tetsuya Watanabe, Honjyo, JP;
Hisato Nakamura, Kodama, JP;
Takahiro Jingu, Takasaki, JP;
Yuko Inoue, Okegawa, JP;
Keiichi Saiki, Hitachinaka, JP;
Kenji Watanabe, Oume, JP;
Other;
Abstract
A system and method of inspecting a foreign particle or a defect on a sample are provided. Such a method comprises irradiating light to an object to be inspected; detecting reflected light or scattered light from the object to be inspected irradiated with the light; detecting a signal of the foreign particle or the defect from the detected signal; providing information related to a size of the foreign particle or the defect from the signal of the detected foreign particle or the defect; and outputting information on a display screen a distribution of the size of the foreign particle or defect with information indicating a cause of the distribution of the foreign particle or defect.