The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 28, 2021

Filed:

Jun. 21, 2019
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Ling-Wei Li, Hsinchu, TW;

Cheng-Lin Huang, Hsinchu, TW;

Min-Tar Liu, Jhubei, TW;

Fu-Kang Chiao, Hsinchu, TW;

Matt Chou, Hsinchu, TW;

Chun-Yen Lo, Hsinchu, TW;

Che-Jung Chu, Hsinchu, TW;

Wen-Ming Chen, Zhunan Township, TW;

Kuo-Chio Liu, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); H01L 23/498 (2006.01); H01L 23/00 (2006.01); G06F 30/392 (2020.01); G06F 30/398 (2020.01); G06F 113/18 (2020.01);
U.S. Cl.
CPC ...
H01L 23/49838 (2013.01); G06F 30/392 (2020.01); G06F 30/398 (2020.01); H01L 21/4853 (2013.01); H01L 23/49816 (2013.01); H01L 24/11 (2013.01); H01L 24/16 (2013.01); H01L 24/17 (2013.01); H01L 24/81 (2013.01); G06F 2113/18 (2020.01); H01L 2224/11462 (2013.01); H01L 2224/11464 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/1703 (2013.01); H01L 2224/17132 (2013.01); H01L 2224/17517 (2013.01); H01L 2224/81815 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/384 (2013.01);
Abstract

A method includes receiving a first design for conductive bumps on a first surface of an interposer, the conductive bumps in the first design having a same cross-section area; grouping the conductive bumps in the first design into a first group of conductive bumps in a first region of the first surface and a second group of conductive bumps in a second region of the first surface, where a bump pattern density of the second region is lower than that of the first region; forming a second design by modifying the first design, where modifying the first design includes modifying a cross-section area of the second group of conductive bumps in the second region; and forming the conductive bumps on the first surface of the interposer in accordance with the second design, where after being formed, the first group of conductive bumps and the second group of conductive bumps have different cross-section areas.


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