The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
Aug. 31, 2018
Nuflare Technology, Inc., Yokohama, JP;
Showa Denko K.k., Tokyo-to, JP;
Central Research Institute of Electric Power Industry, Tokyo-to, JP;
Kunihiko Suzuki, Kanagawa, JP;
Naohisa Ikeya, Kanagawa, JP;
Keisuke Fukada, Saitama, JP;
Masahiko Ito, Kanagawa, JP;
Isaho Kamata, Kanagawa, JP;
Hidekazu Tsuchida, Kanagawa, JP;
Hiroaki Fujibayashi, Aichi, JP;
Hideyuki Uehigashi, Aichi, JP;
Masami Naito, Aichi, JP;
Kazukuni Hara, Aichi, JP;
Hirofumi Aoki, Aichi, JP;
Takahiro Kozawa, Aichi, JP;
NuFlare Technology, Inc., Yokohama, JP;
Showa Denko K.K., Tokyo, JP;
Central Research Institute of Electric Power Industry, Tokyo, JP;
Abstract
A supply part includes a first partition, a second partition under the first partition, a third partition under the second partition, a first flow path between the first partition and the second partition allowing a first gas to be introduced therein, a second flow path between the second partition and the third partition allowing a second gas to be introduced therein, a first piping extending from the second partition to reach below the third partition and being communicated with the first flow path, a second piping extending from the third partition to reach below the third partition and being communicated with the second flow path, and a convex portion provided on an outer circumferential surface of the first piping or an inner circumferential surface of the second piping protruding from one of the outer circumferential surface and the inner circumferential surface toward the other one.