Location History:
- Sunnyvale, CA (US) (2001 - 2003)
- Beverly, MA (US) (2008 - 2013)
Company Filing History:
Years Active: 2001-2013
Title: Innovations of Inventor Ziwei Fang
Introduction
Ziwei Fang is a prominent inventor based in Beverly, MA (US), known for his significant contributions to the field of semiconductor technology. With a total of 14 patents to his name, Fang has made remarkable advancements in ion implantation techniques that are crucial for semiconductor manufacturing.
Latest Patents
Fang's latest patents include "Techniques for temperature-controlled ion implantation." This invention discloses an apparatus designed for temperature-controlled ion implantation, featuring a platen that holds a wafer in a single-wafer process chamber. The platen includes a wafer clamping mechanism to secure the wafer and provide a predetermined thermal contact, along with heating elements to maintain the platen at a temperature above room temperature. Additionally, the apparatus incorporates a post-cooling station to cool the wafer after ion implantation.
Another notable patent is "Monitoring plasma ion implantation systems for fault detection and process control." This system comprises a process chamber, a plasma source, and a platen for holding a substrate. It features a plasma monitor to measure ion mass and energy, along with an analyzer to determine the system's operating condition based on these measurements. The system also includes a data acquisition unit to sample implant pulses for further analysis.
Career Highlights
Ziwei Fang is currently employed at Varian Semiconductor Equipment Associates, Inc., where he continues to innovate and develop advanced technologies in the semiconductor industry. His work has significantly impacted the efficiency and effectiveness of ion implantation processes.
Collaborations
Fang has collaborated with notable colleagues, including Matthew J. Goeckner and Vikram Singh, contributing to a dynamic and innovative work environment.
Conclusion
Ziwei Fang's contributions to semiconductor technology through his patents and work at Varian Semiconductor Equipment Associates, Inc. highlight his role as a leading inventor in the field. His innovative techniques continue to shape the future of ion implantation processes.
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