The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2008
Filed:
Feb. 23, 2007
Bon-woong Koo, Andover, MA (US);
Ziwei Fang, Beverly, MA (US);
Ludovic Godet, North Reading, MA (US);
Vikram Singh, North Andover, MA (US);
Vassilis Panayotis Vourloumis, Peabody, MA (US);
Bernard G. Lindsay, Danvers, MA (US);
Bon-Woong Koo, Andover, MA (US);
Ziwei Fang, Beverly, MA (US);
Ludovic Godet, North Reading, MA (US);
Vikram Singh, North Andover, MA (US);
Vassilis Panayotis Vourloumis, Peabody, MA (US);
Bernard G. Lindsay, Danvers, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
A time-of-flight ion sensor for monitoring ion species in a plasma includes a housing. A drift tube is positioned in the housing. An extractor electrode is positioned in the housing at a first end of the drift tube so as to attract ions from the plasma. A plurality of electrodes is positioned at a first end of the drift tube proximate to the extractor electrode. The plurality of electrodes is biased so as to cause at least a portion of the attracted ions to enter the drift tube and to drift towards a second end of the drift tube. An ion detector is positioned proximate to the second end of the drift tube. The ion detector detects arrival times associated with the at least the portion of the attracted ions.