Zhimin Qi

Title: The Innovative Contributions of Zhimin Qi in Semiconductor Technology

Introduction

Zhimin Qi, a prominent inventor based in Fremont, California, has made significant strides in the field of semiconductor technology. With a portfolio of four patents, he has developed cutting-edge methods that enhance the efficiency and performance of semiconductor structures. His work continues to influence the industry and inspire future innovations.

Latest Patents

Zhimin Qi's latest inventions are instrumental in advancing semiconductor manufacturing processes. His first notable patent, titled "Self field-suppression CVD tungsten (W) fill on PVD W liner," presents methods and related apparatus for effectively filling features in a substrate. This process involves depositing a seed layer of tungsten via a physical vapor deposition (PVD) method, followed by a bulk tungsten layer through chemical vapor deposition (CVD). The innovative technique ensures that the CVD process targets the substrate's features selectively, utilizing hydrogen gas and tungsten precursors at varying flow rates.

Another significant patent, "Metal oxide preclean for bottom-up gapfill in MEOL and BEOL," outlines a pre-cleaning method for semiconductor structures. This method comprises a plasma pre-treatment process to eliminate impurities from metal and dielectric layers, followed by a selective etching process aimed at removing molybdenum oxide. The treatment ensures a clean surface, thereby enhancing the effectiveness of subsequent manufacturing steps.

Career Highlights

Zhimin Qi is associated with Applied Materials, Inc., where he applies his expertise in developing advanced semiconductor manufacturing techniques. His role at the company allows him to collaborate on innovative projects that drive the industry forward. His work is characterized by a commitment to improving the reliability and performance of semiconductor devices.

Collaborations

In his innovative journey, Qi has collaborated with esteemed colleagues such as Aixi Zhang and Rongjun Wang. Their combined expertise and shared vision have resulted in breakthrough advancements in semiconductor technologies. Such collaborations emphasize the importance of teamwork in the pursuit of technological advancements.

Conclusion

Zhimin Qi stands out as a key inventor within the semiconductor industry. His innovative patents reflect a deep understanding of complex manufacturing processes and a dedication to enhancing semiconductor technology. With ongoing collaborations and future projects on the horizon, his contributions are sure to leave a lasting impact in the field.