Company Filing History:
1 out of 10,295 
1 out of 29 
1 out of 52,711 
Years Active: 1990-1995
Title: The Innovative Mind of Yutaka Shimada
Introduction: Yutaka Shimada, a distinguished inventor based in Sagamihara, Japan, has made significant contributions to the field of semiconductor processing. With a total of two patents to his name, his inventions showcase advanced technology in plasma processing systems that are critical to modern semiconductor manufacturing.
Latest Patents: Shimada's latest patents include the "Plasma Processing Apparatus Etching Tunnel-Type" and a more general "Plasma Processing Apparatus." The etching tunnel-type apparatus is designed for substrate processing and includes a process tube for enclosing multiple semiconductor wafers. It features injectors for process gas, a vacuum pump, RF electrodes to create a high-frequency electric field, and heaters for direct wafer heating. The accompanying power supply and controller allow precise management of the heating process.
In his plasma processing apparatus, a reaction chamber positioned against a plasma-generating chamber is opened on one surface to maximize efficiency. This design minimizes reflected waves and enhances the conversion of microwave energy into plasma, significantly improving energy usage in semiconductor processing.
Career Highlights: Throughout his career, Yutaka Shimada has been associated with prominent companies, notably Tokyo Electron Limited and Tokyo Electron Tohoku Limited. His experience in these organizations has equipped him with invaluable insights into the intricacies of semiconductor technology and plasma applications.
Collaborations: Yutaka has worked alongside talented individuals such as Hitoshi Kato and Junichi Kakizaki. Their collaborative efforts have contributed to advancements in plasma technology, further underscoring the importance of teamwork in innovation.
Conclusion: Yutaka Shimada's contributions to the field of semiconductor processing through his innovative inventions have solidified his status as a notable inventor. With his focused approach to developing advanced plasma processing systems, he continues to influence the semiconductor industry, paving the way for future advancements in the field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.