Zhubei, Taiwan

Yung-Yao Lee

USPTO Granted Patents = 54 

Average Co-Inventor Count = 2.7

ph-index = 3

Forward Citations = 66(Granted Patents)

Forward Citations (Not Self Cited) = 49(Dec 10, 2025)


Location History:

  • Hsinchu County, TW (2018 - 2023)
  • Zhubei, TW (2013 - 2024)
  • Hsinchu, TW (2024)

Company Filing History:


Years Active: 2013-2025

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Areas of Expertise:
Immersion Lithography
Semiconductor Manufacturing
Wafer Cooling
Photoresist Layer
Chemical Mechanical Polishing
Surface Topography Measurement
Overlay Metrology
Drippage Prevention
Exposure Performance
Substrate Processing
Optical Module Structure
Patterning Method
54 patents (USPTO):Explore Patents

Title: Innovating Semiconductor Development: The Contributions of Yung-Yao Lee

Introduction: Yung-Yao Lee, based in Zhubei, Taiwan, is a prominent inventor and semiconductor engineer known for his significant contributions to the field of semiconductor technology. With an impressive portfolio of 51 patents, he has demonstrated his commitment to advancing semiconductor manufacturing processes.

Latest Patents: Among his latest innovations are two noteworthy patents that highlight his expertise:

1. **Semiconductor Developer Tool and Methods of Operation:** This developer tool features a unique dispenser design that incorporates a greater number of nozzles at the center compared to the perimeter. This design allows for more effective removal of material from photoresist layers, particularly where the photoresist tends to be thicker. By minimizing photoresist residue on substrates, this innovation enhances defect removal, increases semiconductor processing yield, and ultimately improves processing quality.

2. **Resist Pump Buffer Tank and Method of Resist Defect Reduction:** This patent details a resist material dispensing system that includes a resist supply and filter, connected to a vertically arranged resist tank structure. The continuous downward flow of resist material from entry to exit within the tank structure promotes consistency and quality in the dispensing process, further reducing defects in the semiconductor manufacturing process.

Career Highlights: Yung-Yao Lee has established a noteworthy career at Taiwan Semiconductor Manufacturing Company Limited, a leading global player in the semiconductor industry. His innovative spirit and engineering prowess have made substantial impacts on the efficiency and effectiveness of semiconductor production.

Collaborations: Throughout his career, Lee has collaborated with distinguished colleagues such as Heng-Hsin Liu and Jui-Chun Peng. Their teamwork and shared expertise have propelled advancements in semiconductor technologies, demonstrating the importance of collaboration in innovation.

Conclusion: Yung-Yao Lee exemplifies the spirit of innovation in the semiconductor industry. With multiple patents to his name and a dedication to enhancing manufacturing processes, he continues to influence semiconductor technology positively. His contributions are vital to the ongoing evolution of this critical sector, setting standards for quality and efficiency in semiconductor production.

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