The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2026

Filed:

Jun. 27, 2024
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Chien-Hung Wang, Toufen Township, TW;

Chun-Chih Lin, Taipei City, TW;

Chi-Hung Liao, Sanchong City, TW;

Yung-Yao Lee, Zhubei City, TW;

Wei Chang Cheng, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 11/10 (2006.01); F16K 7/12 (2006.01); F16K 23/00 (2006.01); F16K 31/122 (2006.01); F16K 37/00 (2006.01); H01L 21/67 (2006.01); B05C 5/02 (2006.01); B05C 11/08 (2006.01); G03F 7/16 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
B05C 11/1002 (2013.01); F16K 7/126 (2013.01); F16K 23/00 (2013.01); F16K 31/1221 (2013.01); F16K 37/0041 (2013.01); H01L 21/67017 (2013.01); H01L 21/6715 (2013.01); B05C 5/02 (2013.01); B05C 11/08 (2013.01); G03F 7/162 (2013.01); G03F 7/3021 (2013.01);
Abstract

A method of preventing drippage in a liquid dispensing system includes generating at least a first proxy signal representing at least a first indirect measure of a position of a first automatic control valve (ACV), wherein the first ACV has positions ranging from fully closed to fully open. The method further includes recognizing, based on at least the first proxy signal, whether a failure state exists in which the first ACV has failed to close. The method further includes causing a second ACV to close when the failure state exists, wherein the second ACV is fluidically connected to the first ACV, and the second ACV has positions ranging from fully closed to fully open.


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