The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 30, 2024

Filed:

Oct. 05, 2020
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Chien-Hung Wang, Toufen Township, TW;

Chun-Chih Lin, Taipei, TW;

Chi-Hung Liao, Sanchong, TW;

Yung-Yao Lee, Zhubei, TW;

Wei Chang Cheng, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 11/10 (2006.01); F16K 7/12 (2006.01); F16K 23/00 (2006.01); F16K 31/122 (2006.01); F16K 37/00 (2006.01); H01L 21/67 (2006.01); B05C 5/02 (2006.01); B05C 11/08 (2006.01); G03F 7/16 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
B05C 11/1002 (2013.01); F16K 7/126 (2013.01); F16K 23/00 (2013.01); F16K 31/1221 (2013.01); F16K 37/0041 (2013.01); H01L 21/67017 (2013.01); H01L 21/6715 (2013.01); B05C 5/02 (2013.01); B05C 11/08 (2013.01); G03F 7/162 (2013.01); G03F 7/3021 (2013.01);
Abstract

A method of preventing drippage in a fluid dispensing system. The fluid dispensing system includes a first automatic control valve (ACV), an input of the first ACV connected to fluid-source of fluid, the first ACV having positions ranging from fully closed to fully open, and a second ACV, an input of the second ACV being connected to an output of the first ACV, and an output of the second ACV being connected to a nozzle, the second ACV having positions ranging from fully closed to fully open. The method includes generating a first proxy signal representing at least a first indirect measure of a position of the first ACV. The method includes recognizing, based on at least the first proxy signal that a failure state exists in which the first ACV has failed to close. The method includes causing the second ACV to close when the failure state exists.


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