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For the Inventor, By the Inventor

Hsinchu, Taiwan

Yung-Haw Liaw

This inventor holds 9 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 1994-2018.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Yung-Haw Liaw. Retrieved from https://idiyas.com/inventor/yung-haw-liaw

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 9

% Patents Active = 100.0

Average Co-Inventor Count = 3.6

ph-index = 5

Forward Citations = 160(Granted Patents)


Location History:

  • Hsin, TW (1995)
  • Hsin-Chu, TW (1994 - 2018)

Company Filing History:

goldMedal9 out of 42,926 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents

Years Active: 1994-2018

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9 patents (USPTO):Explore Patents
1. 9892982 - Method for controlling exhaust flow in wafer processing module (2018-02-13),
2. 6365303 - Electrostatic discharge damage prevention method on masks (2002-04-02),
3. 6143618 - Procedure for elimating flourine degradation of WSi.sub.x (2000-11-07),
4. 6127269 - Method for enhancing sheet resistance uniformity of chemical vapor (2000-10-03),
5. 5731243 - Method of cleaning residue on a semiconductor wafer bonding pad (1998-03-24),
6. 5454871 - SOG coated apparatus to solve SOG non-uniformity in the VLSI process (1995-10-03),
7. 5434096 - Method to prevent silicide bubble in the VLSI process (1995-07-18),
8. 5371046 - Method to solve sog non-uniformity in the VLSI process (1994-12-06),
9. 5334554 - Nitrogen plasma treatment to prevent field device leakage in VLSI (1994-08-02),

Title: Yung-Haw Liaw: Innovator in Semiconductor Processing

Introduction

Yung-Haw Liaw is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor processing, holding a total of 9 patents. His innovative work focuses on enhancing the efficiency and safety of wafer processing techniques.

Latest Patents

One of his latest patents is a method for controlling exhaust flow in a wafer processing module. This invention involves placing a wafer into a processing assembly and heating it. The method produces an exhaust flow from the processing assembly via a fluid-conduit assembly. It also includes detecting the exhaust pressure and regulating the exhaust flow accordingly. Another notable patent is the electrostatic discharge damage prevention method on masks. This invention features a mask pattern with an anti-ESD ring that protects the pattern region from damage due to electrostatic discharge events. The design includes ESD fingers that act as lightning rods, confining ESD events to a preferred region of the mask.

Career Highlights

Yung-Haw Liaw is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that are critical for modern electronics.

Collaborations

He has collaborated with notable coworkers such as Hsin-Chieh Huang and Pao-Ling Kuo, contributing to various innovative projects within the company.

Conclusion

Yung-Haw Liaw's contributions to semiconductor processing through his patents and collaborative efforts highlight his role as a key innovator in the industry. His work continues to influence advancements in technology and manufacturing processes.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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