Yung-Haw Liaw is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor processing, holding a total of 9 patents. His innovative work focuses on enhancing the efficiency and safety of wafer processing techniques.

Latest Patents

One of his latest patents is a method for controlling exhaust flow in a wafer processing module. This invention involves placing a wafer into a processing assembly and heating it. The method produces an exhaust flow from the processing assembly via a fluid-conduit assembly. It also includes detecting the exhaust pressure and regulating the exhaust flow accordingly. Another notable patent is the electrostatic discharge damage prevention method on masks. This invention features a mask pattern with an anti-ESD ring that protects the pattern region from damage due to electrostatic discharge events. The design includes ESD fingers that act as lightning rods, confining ESD events to a preferred region of the mask.

Career Highlights

Yung-Haw Liaw is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that are critical for modern electronics.

Collaborations

He has collaborated with notable coworkers such as Hsin-Chieh Huang and Pao-Ling Kuo, contributing to various innovative projects within the company.

Conclusion

Yung-Haw Liaw's contributions to semiconductor processing through his patents and collaborative efforts highlight his role as a key innovator in the industry. His work continues to influence advancements in technology and manufacturing processes.

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