Yukinobu Otsuka

Title: Innovations by Yukinobu Otsuka

Introduction

Yukinobu Otsuka is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 3 patents. His work primarily focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses and methods.

Latest Patents

Otsuka's latest patents include a substrate processing apparatus, a substrate processing method, and a storage medium. The substrate processing apparatus is designed to perform heat processing on substrates with films formed on them. It features a heat processing unit that includes a heater, a chamber, a gas ejector, an outer peripheral exhauster, and a central exhauster. This innovative design allows for precise control over the heat treatment process.

Additionally, his heat treatment apparatus is intended for heating substrates with coating films in a treatment container. It consists of a mount, a heating part, a suction pipe, and a collection container. This setup is engineered to efficiently collect sublimates during the treatment process, showcasing Otsuka's commitment to improving substrate processing technologies.

Career Highlights

Yukinobu Otsuka is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this company has allowed him to develop and patent innovative technologies that contribute to advancements in substrate processing.

Collaborations

Otsuka has collaborated with notable coworkers such as Shinsuke Takaki and Yasuhiro Kuga. Their combined expertise has likely played a role in the successful development of Otsuka's patented technologies.

Conclusion

Yukinobu Otsuka's contributions to substrate processing through his innovative patents reflect his expertise and dedication to advancing technology in this field. His work continues to influence the industry and pave the way for future innovations.