Location History:
- Kawasaki, JP (1986)
- Tokyo, JP (1992)
- Kanagawa-ken, JP (2001)
- Yokohama, JP (1992 - 2003)
Company Filing History:
15 out of 52,751 
10 out of 10,341 
1 out of 71 
Years Active: 1986-2003
Title: The Innovative Contributions of Yukimasa Yoshida
Introduction
Yukimasa Yoshida is a prominent inventor based in Yokohama, Japan, with a remarkable portfolio that includes 18 patents. His innovative work primarily focuses on plasma processing methods and semiconductor device manufacturing techniques, contributing significantly to advancements in the semiconductor industry.
Latest Patents
Among his latest patents, Yoshida has developed a plasma processing method that involves a unique arrangement of electrodes within a processing chamber. The design includes a first high-frequency power supply section and a second high-frequency power supply section, both connected to the lower electrode. This innovative setup allows for the application of two frequencies—a first high-frequency power component of at least 10 MHz and a second of at least 2 MHz—ensuring that ions in the plasma are accelerated by self-bias voltage, allowing for precise wafer processing.
Additionally, his semiconductor device manufacturing method outlines a systematic approach that enhances manufacturing efficiency. This method encompasses six steps, starting with loading a processed substrate in a reaction chamber, introducing reaction gas, maintaining pressure, and generating plasma by supplying high-frequency power. The process culminates in a seamless transition from plasma generation to the cessation of power supply, thereby maintaining gas flow for optimal processing.
Career Highlights
Yukimasa Yoshida has an impressive career, having worked with renowned companies such as Kabushiki Kaisha Toshiba and Tokyo Electron Limited. His contributions within these organizations have been vital in pushing the boundaries of semiconductor technology and plasma processing.
Collaborations
Throughout his career, Yoshida has collaborated with esteemed colleagues like Keiji Horioka and Katsuya Okumura. Their combined expertise has fostered a dynamic environment that encourages innovation and technological advancement in their respective fields.
Conclusion
Yukimasa Yoshida's inventive spirit and dedication to advancing technology in semiconductor manufacturing underscore his significant role as an inventor. With his extensive patents and collaborative efforts, he continues to influence the industry and inspire future innovations. His work not only showcases his technical prowess but also marks a significant contribution to the evolution of modern semiconductor device fabrication techniques.