The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2002
Filed:
Jun. 29, 2000
Masaki Narita, Yokohama, JP;
Yukimasa Yoshida, Yokohama, JP;
Katsuaki Aoki, Yokohama, JP;
Hiroshi Fujita, Yokohama, JP;
Takashi O, Yokohama, JP;
Toshimitsu Omine, Tokyo, JP;
Isao Matsui, Tokorozawa, JP;
Osamu Yamazaki, Yokohama, JP;
Naruhiko Kaji, Kamakura, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
There is provided a semiconductor device manufacturing method that comprises a first step of loading a processed substrate in a reaction chamber, a second step of introducing a reaction gas into the reaction chamber at a predetermined flow rate, a third step of maintaining an interior of the reaction chamber at a predetermined pressure, a fourth step of starting generation of plasma by supplying a high frequency power to an electrode arranged in the reaction chamber, a fifth step of applying a predetermined process to the processed substrate, and a sixth step of stopping generation of the plasma by stopping supply of the high frequency power after the predetermined process is completed, wherein the reaction gas is introduced continuously when the generation of the plasma is stopped.