The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 1993
Filed:
Nov. 29, 1991
Applicant:
Inventors:
Yukimasa Yoshida, Yokohama, JP;
Satoshi Kaneko, Yokohama, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ;
U.S. Cl.
CPC ...
156345 ; 156643 ; 20429835 ;
Abstract
A transporting device used in a plasma etching apparatus comprises a loading unit having a loading surface on which articles to be treated are loaded, and a moving mechanism for moving the loading unit. The loading unit is coated with an electrically conducting layer for moving electric charges accumulated on the loading surface due to plasma etching and preventing erosion of the loading unit.