Yuh-Ta Fan

Title: Yuh-Ta Fan: Innovator in Semiconductor Technology

Introduction

Yuh-Ta Fan is a prominent inventor based in Shinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 13 patents. His work focuses on advancing semiconductor devices and manufacturing methods, which are crucial for modern electronics.

Latest Patents

One of Yuh-Ta Fan's latest patents is titled "Trench isolation with conductive structures." This patent describes a semiconductor device that features metal boundary trench isolation with electrically conductive intermediate structures acting as a metal diffusion barrier. The semiconductor structure includes a first fin structure and a second fin structure on a substrate, with an insulating layer positioned between them. Additionally, a gate dielectric layer is placed on the insulating layer and the fin structures. The invention also details the arrangement of work function stacks and a conductive intermediate structure, which enhances the performance of semiconductor devices.

Another notable patent is related to the "Method of manufacturing semiconductor devices and semiconductor devices." This method outlines the process of forming a gate dielectric layer over a channel region, followed by the application of a first conductive layer. A protective layer is then formed at the surface region of the first conductive layer, and a metallic layer is created using a metal-containing gas. The process concludes with the removal of the metallic layer through a wet etching operation, ensuring that the protective layer remains intact.

Career Highlights

Yuh-Ta Fan is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to push the boundaries of semiconductor technology and contribute to the development of innovative devices.

Collaborations

Throughout his career, Yuh-Ta Fan has collaborated with notable colleagues, including Ding-I Liu and Chih-Fen Chen. These collaborations have fostered a productive environment for innovation and have led to the successful development of various semiconductor technologies.

Conclusion

Yuh-Ta Fan's contributions to semiconductor technology are significant and impactful. His innovative patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key figure in advancing the field. His ongoing efforts continue to shape the future of semiconductor devices and manufacturing methods.