This inventor holds 20 USPTO granted patents, primarily in Plasma Etching Technology. Top assignees: Applied Materials, Inc., Novellus Systems Incorporated, Applied Komatsu Technology, Inc.. Active years: 1995-2011.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Taipai, TW (1999)
- Cupertino, CA (US) (1995 - 2011)
Company Filing History:
9 out of 14,482 
6 out of 993 
5 out of 57 
Years Active: 1995-2011
Areas of Expertise:
Title: **Innovative Contributions of Yuh-Jia (Jim) Su**
Introduction
Yuh-Jia (Jim) Su, based in Cupertino, CA, is an accomplished inventor with a remarkable portfolio of 20 patents. His work primarily focuses on enhancing processes in semiconductor manufacturing, particularly in cleaning methodologies post-etching.
Latest Patents
One of Su's latest inventions is a method for post-etch cleans, which presents a cleaning process that increases efficiency while minimizing damage to device structures. The process entails a sequence of cleaning steps: after etching and photoresist stripping, a first plasma clean is performed, which may involve multiple steps. This is followed by a first hydrogen-oxygen (HO) based clean, which can take forms such as a de-ionized water rinse, water vapor clean, or a plasma clean that includes hydrogen and oxygen. A second plasma clean follows, again consisting of various steps, before concluding with a second HO based clean. This innovative approach allows for effective cleaning of diverse etches, including metal etches, via etches, contact etches, polysilicon etches, nitride etches, and shallow trench isolation etches. Additionally, the removal of photoresist can be executed before, during, or after these cleaning processes using an oxygen-containing plasma at low temperatures.
Career Highlights
During his illustrious career, Jim Su has made significant contributions while working with leading firms in the semiconductor industry, including Applied Materials, Inc. and Novellus Systems Incorporated. His expertise and innovative mindset have played a crucial role in advancing cleaning technologies in semiconductor fabrication.
Collaborations
Su has collaborated with prominent colleagues in his field, such as Yuen-Kui (Jerry) Wong and Kam S Law. Their combined efforts have further propelled advancements in the cleaning processes essential for maintaining the integrity of semiconductor devices.
Conclusion
Yuh-Jia (Jim) Su's contributions to the field of semiconductor manufacturing through his patents exemplify the importance of innovation in technology. His dedication to developing methods that enhance cleaning efficiency while reducing device damage signifies a noteworthy impact that will continue to influence future advancements in the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile