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Hopewell Junction, NY, United States of America

Yue J Li

USPTO Granted Patents = 9 (Patent Applications = 2)

Average Co-Inventor Count = 3.9

ph-index = 3

Forward Citations = 28(Granted Patents)

Company Filing History:

9 out of 164,108

International Business Machines Corporation

Years Active: 2006-2013

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9 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 8565910 - Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing process (2013-10-22),

2. 8229691 - Method for using real-time APC information for an enhanced lot sampling engine (2012-07-24),

3. 7899566 - Factory level and tool level advanced process control systems integration implementation (2011-03-01),

4. 7895008 - Method of performing measurement sampling of lots in a manufacturing process (2011-02-22),

5. 7577537 - Providing a dynamic sampling plan for integrated metrology (2009-08-18),

6. 7509186 - Method and system for reducing the variation in film thickness on a plurality of semiconductor wafers having multiple deposition paths in a semiconductor manufacturing process (2009-03-24),

7. 7489980 - Factory level and tool level advanced process control systems integration implementation (2009-02-10),

8. 7398172 - Method and system of providing a dynamic sampling plan for integrated metrology (2008-07-08),

9. 7113845 - Integration of factory level and tool level advanced process control systems (2006-09-26),

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