The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2011
Filed:
Jan. 02, 2009
Gary W. Behm, Hopewell Junction, NY (US);
Emily M. Hwang, Hopewell Junction, NY (US);
Yue LI, Hopewell Junction, NY (US);
Teresita Q. Magtoto, Poughkeepsie, NY (US);
Gary W. Behm, Hopewell Junction, NY (US);
Emily M. Hwang, Hopewell Junction, NY (US);
Yue Li, Hopewell Junction, NY (US);
Teresita Q. Magtoto, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Integration of factory level advanced process control (FL-APC) system and tool level advanced process control (TL-APC) system using selectable APC operation modes indicating different operational settings for the FL-APC system and at least one TL-APC system is disclosed. During operation, the FL-APC system controls operation of the TL-APC system. The invention allows a manufacturing execution system (MES) to have additional capability to run the process control functions at FL-APC system and/or TL-APC system, and allows integration of a variety of different tools with a TL-APC system. An implementation method, system and program product are also disclosed.