The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2008
Filed:
May. 31, 2006
Gary W. Behm, Hopewell Junction, NY (US);
Emily M. Hwang, Hopewell Junction, NY (US);
Yue J. LI, Hopewell Junction, NY (US);
Teresita Q. Magtoto, Poughkeepsie, NY (US);
Derek C. Stoll, Hopewell Junction, NY (US);
Gary W. Behm, Hopewell Junction, NY (US);
Emily M. Hwang, Hopewell Junction, NY (US);
Yue J. Li, Hopewell Junction, NY (US);
Teresita Q. Magtoto, Poughkeepsie, NY (US);
Derek C. Stoll, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method and system of providing a dynamic sampling plan for integrated metrology is disclosed. The method may include modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system and sending a recommended sampling plan, in response to receiving a request for a sampling plan, wherein the recommended sampling plan is based upon the modeling and the request. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.