Yoshiyuki Suda

Title: Innovations of Yoshiyuki Suda in Semiconductor Technology

Introduction

Yoshiyuki Suda is a prominent inventor based in Koganei, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on the development of advanced semiconductor laminated films, which are crucial for various electronic applications.

Latest Patents

Suda's latest patents include a manufacturing method for semiconductor laminated film and the semiconductor laminated film itself. The semiconductor laminate film consists of a silicon substrate and a semiconductor layer that contains both silicon and germanium. This semiconductor layer is characterized by a surface roughness Rms of 1 nm or less. Furthermore, it adheres to a specific relationship where the thickness (t) of the semiconductor layer is less than or equal to 0.881 times the ratio (x) of germanium atoms to the total number of silicon and germanium atoms in the layer.

The manufacturing method involves forming the semiconductor layer on a silicon substrate using a sputtering method. This method specifies that the film formation temperature should be less than 500°C, with a film formation pressure ranging from 1 mTorr to 11 mTorr. Alternatively, if the film formation temperature is less than 600°C, the pressure should be between 2 mTorr and 5 mTorr. The sputtering process utilizes a gas mixture with less than 0.1% hydrogen, ensuring the semiconductor layer meets the aforementioned thickness-to-ratio relationship.

Career Highlights

Yoshiyuki Suda has worked at notable institutions, including the Tokyo University of Agriculture and Technology and the National Institute for Research in Inorganic Materials. His research has significantly advanced the understanding and application of semiconductor materials.

Collaborations

Throughout his career, Suda has collaborated with esteemed colleagues such as Koh Era and Satoshi Agawa. These partnerships have contributed to the innovative developments in semiconductor technology.

Conclusion

Yoshiyuki Suda's contributions to semiconductor technology through his patents and research have established him as a key figure in the field. His work continues to influence advancements in electronic materials and applications.