This inventor holds 6 USPTO granted patents. Top assignees: Tokyo Electron Limited, Tokyo Electron Limi Ted. Active years: 2013-2021.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Nirasaki, JP (2013 - 2020)
- Miyagi, JP (2020 - 2021)
Company Filing History:
Years Active: 2013-2021
Title: Innovations of Yoshinobu Ohya
Introduction
Yoshinobu Ohya is a notable inventor based in Nirasaki, Japan. He has made significant contributions to the field of vacuum and plasma processing technologies. With a total of six patents to his name, Ohya's work has had a considerable impact on various industrial applications.
Latest Patents
One of his latest patents is a vacuum processing apparatus. This apparatus includes a heat receiving member with a heat receiving surface designed to absorb heat from a heat source. Additionally, it features a coolant path within the heat receiving member that allows coolant to flow, enhancing the efficiency of the heat transfer process. The coolant path is ingeniously designed with grooves that direct the flow of coolant in an inclined manner, optimizing the cooling effect.
Another significant patent is related to a plasma processing apparatus and method. This method involves an etching process where an etching gas is supplied into a process container. A target substrate is supported on a second electrode, and RF power is applied for plasma generation. The process also includes applying a negative DC voltage to an upper electrode to enhance the etching efficiency. This innovative approach allows for better control over the etching process, leading to improved results.
Career Highlights
Yoshinobu Ohya has worked with prominent companies in the semiconductor industry, including Tokyo Electron Limited. His experience in these organizations has allowed him to develop and refine his innovative technologies, contributing to advancements in the field.
Collaborations
Ohya has collaborated with notable colleagues such as Akira Koshiishi and Masaru Sugimoto. Their combined expertise has fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Yoshinobu Ohya's contributions to vacuum and plasma processing technologies are noteworthy. His innovative patents and collaborations have significantly advanced the industry, showcasing his expertise and dedication to innovation.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile