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Nirasaki, Japan

Yoshiaki Sasaki

USPTO Granted Patents = 12

Average Co-Inventor Count = 2.7

ph-index = 6

Forward Citations = 658(Granted Patents)

Location History:

Yamanshi-ken, JP (2001)
Tamaho-cho, JP (2001)
Yamanashi-Ken, JP (2006)
Yamanashi, JP (2007 - 2019)
Nirasaki, JP (2003 - 2023)

Company Filing History:

10 out of 10,341

Tokyo Electron Limited

2 out of 832,880

Other

patents

Years Active: 2001-2023

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12 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11856655 - Substrate processing apparatus and substrate processing method (2023-12-26),

2. 10720356 - Substrate processing apparatus and method of transferring substrate (2020-07-21),

3. 10256128 - Cooling mechanism and processing system (2019-04-09),

4. 9541920 - Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit (2017-01-10),

5. 8318238 - Film position adjusting method, memory medium and substrate processing system (2012-11-27),

6. 7279067 - Port structure in semiconductor processing system (2007-10-09),

7. 6984097 - Mounting/demounting device for wafer carrier lid (2006-01-10),

8. 6742980 - Method for aligning conveying position of object processing system, and object processing system (2004-06-01),

9. 6676356 - Device for attaching target substrate transfer container to semiconductor processing apparatus (2004-01-13),

10. 6579056 - Cart for mounting/demounting wafer transfer robot (2003-06-17),

11. 6328864 - Vacuum processing apparatus (2001-12-11),

12. 6224679 - Controlling gas in a multichamber processing system (2001-05-01),

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