The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2006
Filed:
Jun. 28, 2000
Hiroaki Saeki, Shirane-Machi, JP;
Yoshiaki Sasaki, Yamanashi-Ken, JP;
Keiichi Matsushima, Kofu, JP;
Yasushi Taniyama, Toyohashi, JP;
Shuuji Hagiwara, Toyohashi, JP;
Hiroaki Saeki, Shirane-Machi, JP;
Yoshiaki Sasaki, Yamanashi-Ken, JP;
Keiichi Matsushima, Kofu, JP;
Yasushi Taniyama, Toyohashi, JP;
Shuuji Hagiwara, Toyohashi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
An attaching and removing unit of a lid for a wafer carrier according to the invention includes: a lid holding plate that can move forward and backward relatively to a lid for a wafer carrier provided with a lock unit having a keyhole exposed outside, on a side of the keyhole; a driver for causing the lid holding plate to move forward and backward; and a key element protruding from the lid holding plate on a side of the lid in a pivotable manner, the key element disposed opposite the keyhole in a direction of the forward and backward movement. The lock unit is adapted to be locked and unlocked by the key element pivoting in the keyhole. In a locked state, the key element can be inserted into and released from the keyhole, and in an unlocked state, the key element is engaged with and can not be released from the keyhole, while the lid holding plate holds the lid. The lid holding plate is provided with a lid-detecting unit for detecting whether the lid holding plate is holding the lid or not.