Company Filing History:
Years Active: 2013-2024
Title: Yoichi Shiokawa: Innovator in Substrate Processing Technology
Introduction
Yoichi Shiokawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing, holding a total of 17 patents. His work focuses on improving the efficiency and accuracy of substrate processing apparatuses and methods.
Latest Patents
Shiokawa's latest patents include a substrate processing apparatus, substrate processing system, and substrate processing method. The objective of his invention is to enhance a substrate processing apparatus using the CARE method. This innovative apparatus polishes a processing target region of a substrate by bringing the substrate and a catalyst into contact with each other in the presence of processing liquid. The design features a substrate holding unit, a catalyst holding unit, and a driving unit that allows for relative movement between the two units while maintaining contact. Notably, the catalyst is smaller than the substrate, which optimizes the polishing process.
Another significant patent is an optical film-thickness measuring apparatus. This device eliminates the influence of fluid flow on optical fiber cables, allowing for highly accurate measurements of film thickness. The apparatus includes a light-emitting optical fiber cable connected to a light source and a light-receiving optical fiber cable that captures reflected light from the workpiece. The design also incorporates a cable housing and a flow-passage structure to define a fluid passage adjacent to the optical fibers.
Career Highlights
Yoichi Shiokawa is currently employed at Ebara Corporation, a leading company in the field of fluid machinery and environmental engineering. His work at Ebara has allowed him to develop cutting-edge technologies that advance substrate processing techniques.
Collaborations
Shiokawa has collaborated with notable coworkers, including Keita Yagi and Katsuhide Watanabe. Their combined expertise has contributed to the successful development of innovative substrate processing solutions.
Conclusion
Yoichi Shiokawa's contributions to substrate processing technology have established him as a key figure in the field. His innovative patents and work at Ebara Corporation continue to influence advancements in substrate processing methods and apparatuses.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.