The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2020
Filed:
Jun. 28, 2017
Ebara Corporation, Tokyo, JP;
Suguru Sakugawa, Tokyo, JP;
Toru Maruyama, Tokyo, JP;
Nobuyuki Takahashi, Tokyo, JP;
Zhongxin Wen, Tokyo, JP;
Yoichi Shiokawa, Tokyo, JP;
Keita Yagi, Tokyo, JP;
Itsuki Kobata, Tokyo, JP;
Tomohiko Takeuchi, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
According to one aspect, a substrate processing apparatus is provided. The substrate processing apparatus includes a table provided with a substrate holding surface for holding a substrate, a pad for processing the substrate held on the table, a head for holding the pad, an actuator for moving the head in a direction perpendicular to the substrate holding surface of the table, and a mechanical stopper device for stopping a movement of the head in the direction perpendicular to the substrate holding surface.