Suguru Sakugawa

Title: Suguru Sakugawa: Innovator in Polishing Technology

Introduction

Suguru Sakugawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of polishing technology, holding a total of seven patents. His innovative work focuses on enhancing the efficiency and effectiveness of polishing processes.

Latest Patents

Sakugawa's latest patents include a polishing-pad laminated structure, a polishing-pad positioning instrument, and a method of attaching a polishing pad to a polishing table. The polishing-pad laminated structure allows for easy alignment of a through-hole of a polishing pad with a sensor head installed in a polishing table. This structure includes a polishing pad and a release sheet, where the release sheet covers an adhesive surface of the polishing pad and is divided into at least a first and a second release sheet. The first release sheet has a surface area smaller than that of the second release sheet. Another notable patent involves a substrate processing apparatus and a method of detecting indentations formed in a substrate. This polishing device features a substrate stage that holds a substrate, a processing head that processes the substrate's surface, and an indentation detecting system that identifies the position of any indentations.

Career Highlights

Suguru Sakugawa has built a successful career at Ebara Corporation, where he continues to innovate in polishing technology. His work has significantly advanced the capabilities of polishing devices, making them more precise and efficient.

Collaborations

Sakugawa collaborates with talented coworkers, including Nobuyuki Takahashi and Toru Maruyama. Their combined expertise contributes to the development of cutting-edge polishing solutions.

Conclusion

Suguru Sakugawa is a key figure in the field of polishing technology, with a strong portfolio of patents that reflect his innovative spirit. His contributions continue to shape the industry and improve polishing processes.