Yigwon Kim

Title: Yigwon Kim: Innovator in Semiconductor Technology

Introduction

Yigwon Kim is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding three patents that showcase his innovative approach to pattern formation and photomask fabrication.

Latest Patents

One of Yigwon Kim's latest patents is a method of forming a pattern. This method involves creating an etching object layer on a substrate, followed by the formation of a photoresist layer that includes metal, oxygen, and an organic material. An exposure process is then performed on the photoresist layer, leading to a developing process that results in a photoresist pattern containing a metal oxide. To remove any residue of the photoresist layer that includes the organic material, ozone is applied to the substrate. The etching object layer is subsequently etched using the photoresist pattern as an etching mask.

Another notable patent involves photomasks and methods for fabricating them, as well as methods for manufacturing semiconductor devices. This patent describes photomasks that consist of a substrate with a pattern region and a peripheral region. It includes a reflection layer on the pattern region that extends into the peripheral region, an absorption structure on the reflection layer, and a dielectric pattern on the absorption structure in the peripheral region, which exposes the absorption structure on the pattern region.

Career Highlights

Yigwon Kim is currently employed at Samsung Electronics Co., Ltd., a leading company in the technology sector. His work at Samsung has allowed him to be at the forefront of semiconductor innovation, contributing to advancements that are crucial for modern electronics.

Collaborations

Yigwon Kim has collaborated with notable colleagues, including Sangjin Kim and Heeyoung Go. These collaborations have likely fostered an environment of innovation and creativity, enhancing the development of new technologies.

Conclusion

Yigwon Kim's contributions to semiconductor technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as an influential inventor in the field. His innovative methods for pattern formation and photomask fabrication continue to impact the industry significantly.