The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 2016

Filed:

Jan. 14, 2016
Applicant:

Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-Do, KR;

Inventors:

Jimyung Kim, Hwaseong-Si, KR;

Yigwon Kim, Hwaseong-Si, KR;

Suhyun Kim, Hwaseong-Si, KR;

Kwangsub Yoon, Yongin-Si, KR;

Bumjoon Youn, Suwon-Si, KR;

Narak Choi, Yongin-Si, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 23/552 (2006.01); H01L 23/58 (2006.01); H01L 23/544 (2006.01);
U.S. Cl.
CPC ...
H01L 23/552 (2013.01); H01L 23/544 (2013.01); H01L 23/585 (2013.01); H01L 2223/54426 (2013.01);
Abstract

A semiconductor device includes a circuit pattern on a substrate, a shielding pattern on the circuit pattern and constituted by a plurality of parallel bars, and lower overlay marking on the shielding pattern and constituted by a plurality of parallel bars which define parallel slits between the bars. The pitch of the bars of the shielding pattern is smaller than the pitch of the bars of the lower overlay marking.


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