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Albany, NY, United States of America

Yen-Tien Lu

This inventor holds 13 USPTO granted patents and 12 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2021-2026.

USPTO Granted Patents = 13 (Patent Applications = 12)

% Patents Active = 76.9

Average Co-Inventor Count = 4.2

ph-index = 2

Forward Citations = 8(Granted Patents)

Location History:

Hillsboro, OR (US) (2022)
Albany, NY (US) (2021 - 2023)

Company Filing History:

13 out of 10,862

Tokyo Electron Limited

Years Active: 2021-2026

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13 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12727414 - Method for processing a substrate (2026-09-01),

2. 12648386 - Method of deposition in high aspect ratio (HAR) features (2026-06-02),

3. 12598932 - Methods and structures for improving etch profile of underlying layers (2026-04-07),

4. 11756790 - Method for patterning a dielectric layer (2023-09-12),

5. 11742241 - ALD (atomic layer deposition) liner for via profile control and related applications (2023-08-29),

6. 11721578 - Split ash processes for via formation to suppress damage to low-K layers (2023-08-08),

7. 11688604 - Method for using ultra thin ruthenium metal hard mask for etching profile control (2023-06-27),

8. 11515203 - Selective deposition of conductive cap for fully-aligned-via (FAV) (2022-11-29),

9. 11289325 - Radiation of substrates during processing and systems thereof (2022-03-29),

10. 11164781 - ALD (atomic layer deposition) liner for via profile control and related applications (2021-11-02),

11. 11121027 - High aspect ratio via etch using atomic layer deposition protection layer (2021-09-14),

12. 10964587 - Atomic layer deposition for low-K trench protection during etch (2021-03-30),

13. 10950444 - Metal hard mask layers for processing of microelectronic workpieces (2021-03-16),

Title: The Innovative Journey of Yen-Tien Lu

Introduction: Yen-Tien Lu, a pioneering inventor based in Albany, NY, has made significant contributions to the field of technology with her groundbreaking innovations.

Latest Patents: Yen-Tien Lu holds several patents in the areas of artificial intelligence, renewable energy, and biotechnology, showcasing her diverse range of expertise and creativity.

Career Highlights: With a career spanning over two decades, Yen-Tien Lu has worked with leading research institutions and tech companies, consistently pushing the boundaries of what is possible in the world of inventions.

Collaborations: Throughout her career, Yen-Tien Lu has collaborated with top scientists, engineers, and designers, fostering a culture of innovation and excellence in all her projects.

Conclusion: Yen-Tien Lu's passion for innovation and her relentless drive to create a better future through her inventions make her a true trailblazer in the world of technology.

Profile summary based on public USPTO records.

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