Company Filing History:
Years Active: 2021-2025
Title: Yen-Chu Yang: Innovator in Chemical Mechanical Polishing Technology
Introduction
Yen-Chu Yang is a prominent inventor based in Santa Clara, CA, known for his contributions to the field of chemical mechanical polishing. With a total of 6 patents to his name, Yang has made significant advancements that enhance the efficiency and effectiveness of polishing processes in semiconductor manufacturing.
Latest Patents
One of his latest patents is focused on the temperature control of chemical mechanical polishing. This innovative system includes a support to hold a polishing pad, a carrier head to hold a substrate against the polishing pad during the polishing process, and an in-situ monitoring system that generates a signal indicative of the amount of material on the substrate. The temperature control system is designed to manage the temperature of the polishing process, with a controller that adjusts the temperature in response to the monitoring signal.
Another notable patent is for a slurry distribution device for chemical mechanical polishing. This apparatus features a rotatable platen that supports a polishing pad, a carrier head to hold a substrate in contact with the pad, and a polishing liquid distribution system. The system includes a dispenser that delivers polishing liquid to a portion of the polishing surface and a curved barrier that spreads fresh polishing liquid from the dispenser.
Career Highlights
Yen-Chu Yang is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work has been instrumental in developing technologies that improve the precision and quality of semiconductor manufacturing processes.
Collaborations
Yang has collaborated with notable colleagues, including Jianshe Tang and Haosheng Wu, contributing to various projects that push the boundaries of innovation in the field.
Conclusion
Yen-Chu Yang's contributions to chemical mechanical polishing technology have established him as a key figure in the semiconductor industry. His innovative patents and collaborative efforts continue to influence advancements in manufacturing processes.
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