Location History:
- Takasaki, JP (2010)
- Tokyo, JP (2003 - 2014)
Company Filing History:
Years Active: 2003-2014
Title: Yasuo Kunii: Innovator in Semiconductor Technology
Introduction
Yasuo Kunii is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 8 patents. His work focuses on substrate processing apparatuses and methods that enhance semiconductor device production.
Latest Patents
Among his latest patents, Yasuo Kunii has developed a substrate processing apparatus and a semiconductor device producing method. This invention features a hot wall type substrate processing apparatus that includes a processing chamber designed to accommodate at least one product substrate. It also incorporates a heating member located outside the processing chamber to heat the product substrate. Additionally, a processing gas supply system is connected to the processing chamber, along with an exhaust system. This innovative design allows for selective growth of an epitaxial film, including silicon, on the surface of the product substrate.
Another notable patent is a substrate processing apparatus that comprises a reaction chamber for stacked substrates, a gas introducing portion, and a buffer chamber. The gas introducing portion is strategically placed along the stacking direction of the substrates, allowing for efficient introduction of substrate processing gas into the buffer chamber. The buffer chamber is equipped with multiple gas-supply openings that facilitate the distribution of processing gas to the reaction chamber.
Career Highlights
Yasuo Kunii is currently employed at Hitachi Kokusai Electric Inc., where he continues to innovate in the semiconductor industry. His expertise and inventions have significantly advanced the capabilities of substrate processing technologies.
Collaborations
Yasuo has collaborated with notable colleagues, including Yasuhiro Inokuchi and Atsushi Moriya. Their combined efforts contribute to the ongoing advancements in semiconductor technology.
Conclusion
Yasuo Kunii's contributions to semiconductor technology through his innovative patents and collaborations highlight his role as a leading inventor in the field. His work continues to influence the development of advanced semiconductor devices.