Location History:
- Kudamatsu, JP (2006)
- Tokyo, JP (2018)
- Hikari, JP (2011 - 2021)
Company Filing History:
7 out of 2,874 
1 out of 1,116 
Years Active: 2006-2021
Title: Yasuhiro Nishimori: Innovator in Plasma Processing Technology
Introduction
Yasuhiro Nishimori is a prominent inventor based in Hikari, Japan. He has made significant contributions to the field of plasma processing, holding a total of 8 patents. His work focuses on improving processing uniformity and efficiency in various applications.
Latest Patents
Nishimori's latest patents include a plasma processing apparatus and a plasma processing method. The plasma processing apparatus is designed to enhance processing uniformity by improving working characteristics in an edge exclusion region. This apparatus generates plasma in a vacuum vessel, where a processing gas is supplied and exhausted to a predetermined pressure. A conductive radio frequency ring is strategically arranged in a stepped part outside the convex part of the sample stage, which supports the wafer. The dielectric cover ring effectively blocks the penetration of radio frequency power to the plasma, ensuring optimal performance.
The plasma processing method involves a multi-step approach to plasma processing a sample. It includes a first step of stopping the supply of gas while introducing an inert gas, followed by a second step where the inert gas supply is halted, and a different gas is introduced. This method allows for precise control over the gas amounts within the process chamber, enhancing the overall efficiency of the plasma processing.
Career Highlights
Throughout his career, Yasuhiro Nishimori has worked with notable companies, including Hitachi High-Technologies Corporation and Hitachi High-Tech Corporation. His experience in these organizations has contributed to his expertise in plasma processing technologies.
Collaborations
Nishimori has collaborated with esteemed colleagues such as Masamichi Sakaguchi and Naoki Yasui. Their combined efforts have further advanced the field of plasma processing.
Conclusion
Yasuhiro Nishimori's innovative work in plasma processing technology has led to significant advancements in the industry. His patents reflect a commitment to improving processing methods and apparatuses, showcasing his role as a key inventor in this field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.