Yasuharu Ariga

Title: Yasuharu Ariga: Innovator in Polishing Technology

Introduction

Yasuharu Ariga is a notable inventor based in Nishigo-mura, Japan. He has made significant contributions to the field of polishing technology, particularly in the semiconductor industry. With a total of 3 patents to his name, Ariga's work focuses on methods and apparatuses that enhance the efficiency and effectiveness of polishing processes.

Latest Patents

Ariga's latest patents include a method of producing a polishing head and a polishing apparatus. The first patent describes a method that involves a backing pad for holding a workpiece's back surface, which is adhered to a rigid body. A ring template is also included to hold the workpiece edge. This innovative polishing head allows for the workpiece's front surface to come into sliding contact with a polishing pad while maintaining the back surface securely. The method emphasizes sticking the backing pad and template under reduced pressure without heating, resulting in a very flat workpiece after polishing.

The second patent focuses on a polishing head designed for semiconductor wafers. This invention features a carrier, guide ring, dress ring, and a head body that is rotatable. The head body has a unique reversed-bowl shape with a sealed hollow. During the polishing process, the pressure within the hollow is regulated, allowing for precise control over the polishing force applied to the wafer. This design effectively prevents excessive polishing and minimizes the risk of scratches or impressions on the wafer's edge.

Career Highlights

Throughout his career, Yasuharu Ariga has worked with prominent companies such as Shin-Etsu Handotai Co., Ltd. and Shin-Etsu Engineering Co., Ltd. His experience in these organizations has contributed to his expertise in polishing technologies and innovations.

Collaborations

Ariga has collaborated with notable colleagues, including Hiromasa Hashimoto and Takahiro Matsuda. These partnerships have likely fostered a creative environment that has led to advancements in their respective fields.

Conclusion

Yasuharu Ariga's contributions to polishing technology, particularly in the semiconductor industry, highlight his innovative spirit and dedication to improving manufacturing processes. His patents reflect a commitment to enhancing the quality and efficiency of polishing methods, making him a significant figure in his field.