Yan Zhang

Title: Yan Zhang: Innovator in Optical Metrology and Semiconductor Fabrication

Introduction

Yan Zhang is a prominent inventor based in Fremont, CA, known for her significant contributions to the fields of optical metrology and semiconductor fabrication. With a total of seven patents to her name, she has made remarkable advancements that enhance the precision and efficiency of manufacturing processes in the semiconductor industry.

Latest Patents

One of her latest patents is focused on optical metrology in machine learning to characterize features. This innovative metrology system includes an optical metrology tool designed to produce outputs for various features on a processed substrate. The system utilizes a machine learning model trained on a diverse set of profiles, critical dimensions, and optical metrology outputs, enabling it to accurately determine the characteristics of features on substrates.

Another notable patent involves a method of etch model calibration using optical scatterometry. This computer-implemented method optimizes a process simulation model that predicts outcomes of semiconductor device fabrication operations. By generating cost values based on predicted results and metrology outcomes, the method enhances the accuracy of process simulations, guiding optimization through various metrology techniques.

Career Highlights

Yan Zhang has worked with leading companies in the semiconductor industry, including Lam Research Corporation and Onto Innovation Inc. Her experience in these organizations has allowed her to apply her innovative ideas and contribute to the advancement of semiconductor technologies.

Collaborations

Throughout her career, Yan has collaborated with notable professionals in her field, including Ye Feng and Marcus Musselman. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in optical metrology.

Conclusion

Yan Zhang's contributions to optical metrology and semiconductor fabrication are significant and impactful. Her innovative patents and collaborations with industry leaders highlight her role as a key figure in advancing technology in these fields.