Company Filing History:
Years Active: 2010-2019
Title: The Innovative Contributions of Yan Shao
Introduction: Yan Shao is a distinguished inventor based in Andover, MA, known for her significant contributions in the field of microelectronic workpiece processing. With a total of nine patents to her name, she has made a notable impact within the technological landscape, driving advancements that enhance the efficiency and precision of manufacturing processes.
Latest Patents: Among her latest patents, two stand out for their innovative approaches. The patent titled "Method for high throughput using beam scan size and beam position in gas cluster ion beam processing system" describes a system and method for performing location-specific processing of a workpiece. This invention involves placing a microelectronic workpiece in a beam processing system, selecting a beam scan size smaller than the dimensions of the workpiece, generating a processing beam, and methodically irradiating the target region within the selected scan size.
Additionally, her patent "Method and apparatus for beam deflection in a gas cluster ion beam system" outlines a method of controlling a gas cluster ion beam (GCIB) system for processing substrates. This innovative system includes deflection plates that direct the GCIB, in conjunction with a substrate scanning device that facilitates precise movement in three dimensions. The method delineates a comprehensive control mechanism for various deflection operating parameters, ensuring optimal exposure and processing of the substrate.
Career Highlights: Yan Shao's career is marked by her role at Tel Epion Corporation, where she has played a vital part in advancing technologies associated with gas cluster ion beam processing. Her expertise and innovative spirit have not only led to her own patents but have also contributed to the larger goals of the company.
Collaborations: Throughout her career, Yan has collaborated with talented colleagues, including Christopher K. Olsen and Martin D. Tabat. These collaborations have fostered a rich environment of innovation, further driving the development of complex processing systems in the field of microelectronics.
Conclusion: Yan Shao exemplifies the role of an impactful inventor in the realm of microelectronic technology. With her impressive array of patents and collaborative projects, she continues to pave the way for advancements in gas cluster ion beam processing systems, showcasing the true essence of innovation in her work.
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