Wen-Hsiang Tang

Title: Innovations of Inventor Wen-Hsiang Tang

Introduction

Wen-Hsiang Tang is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on improving methods and processes in semiconductor manufacturing.

Latest Patents

One of his latest patents is a "Method for testing for blind hole formed in wafer layer." This innovative method detects blind holes in the contact layer of a multi-chip semiconductor test wafer. It utilizes the principle that if a hole is not a blind hole, a subsequent etch step will extend the hole a predetermined distance into the underlying layer. After a specific number of holes have been etched, the contact layer is stripped to expose the holes in the underlying layer. These holes are then scanned optically to identify any missing holes by comparing the holes of different chips on the test wafer. This method is particularly beneficial for high-density plasma etching, where the holes have a very small diameter relative to the thickness of the contact layer.

Another notable patent is the "Method for forming an STI feature to avoid acidic etching of trench sidewalls." This method involves creating a shallow trench isolation feature while preventing acidic etching of the trench sidewalls. The process includes providing a semiconductor substrate with an overlying silicon nitride layer, photolithographically patterning the silicon nitride layer, and anisotropically etching to form a hardmask opening. A polymer layer is then blanket deposited, covering the sidewalls and bottom portion of the hardmask opening, followed by anisotropic etching of a trench opening through the semiconductor substrate.

Career Highlights

Wen-Hsiang Tang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate and develop new technologies in semiconductor manufacturing. His expertise and contributions have made a significant impact on the industry.

Collaborations

Throughout his career, Wen-Hsiang has collaborated with notable colleagues, including Cheng-Hao Huang and Pei-Hung Chen. Their teamwork has fostered advancements in semiconductor technology and has led to the successful development of various innovative solutions.

Conclusion

Wen-Hsiang Tang's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative methods continue to shape the future of semiconductor manufacturing.