Wei-Chun Yen

Title: Innovations of Wei-Chun Yen

Introduction

Wei-Chun Yen is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patents. With a total of 7 patents to his name, Yen continues to push the boundaries of technology.

Latest Patents

Among his latest patents is a lithography apparatus and method. This invention involves a method that includes heating a byproduct transport ring of an extreme ultraviolet source, which is positioned beneath the vanes of the source. The process entails heating the transport ring for a specified duration, followed by heating the vanes, cooling them, and then cooling the transport ring after a second duration. Another notable patent is an inspection tool for an extreme ultraviolet radiation source designed to observe tin residual. This method utilizes a borescope mounted on a fixture that is inserted into the chamber of the EUV radiation source during idle mode. The borescope captures images from inside the chamber, which are then analyzed to determine the amount of tin debris present.

Career Highlights

Wei-Chun Yen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing the technology used in extreme ultraviolet lithography, which is crucial for the production of smaller and more efficient semiconductor devices.

Collaborations

Yen has collaborated with notable colleagues, including Shang-Chieh Chien and Li-Jui Chen. Their combined expertise has contributed to the successful development of innovative technologies in the semiconductor field.

Conclusion

Wei-Chun Yen's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in manufacturing processes and equipment.