Location History:
- Miyagi, JP (2014 - 2017)
- Sendai, JP (2018)
- Amagasaki, JP (2011 - 2021)
Company Filing History:
Years Active: 2011-2021
Title: Wataru Yoshikawa: Innovator in Semiconductor Processing
Introduction
Wataru Yoshikawa is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of semiconductor processing, holding a total of 8 patents. His innovative work has advanced the technology used in manufacturing and processing semiconductor wafers.
Latest Patents
Yoshikawa's latest patents include a manufacturing method of a sample table and a plasma processing method and apparatus. The manufacturing method of the sample table involves preparing an adsorption plate that holds a semiconductor wafer for plasma processing. This method ensures that the semiconductor wafer is effectively adsorbed and supported during the manufacturing process. The plasma processing apparatus features a slot plate of an antenna with slots arranged circumferentially. This design allows for efficient microwave introduction into the processing space, facilitating a two-step cleaning process that enhances the quality of the semiconductor wafers.
Career Highlights
Wataru Yoshikawa is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work has been instrumental in developing advanced technologies that improve semiconductor manufacturing processes. His expertise and innovative approaches have positioned him as a key figure in the field.
Collaborations
Yoshikawa collaborates with talented coworkers, including Naoki Matsumoto and Jun Yoshikawa. Together, they contribute to the ongoing advancements in semiconductor technology, fostering a collaborative environment that encourages innovation.
Conclusion
Wataru Yoshikawa's contributions to semiconductor processing through his patents and work at Tokyo Electron Limited highlight his role as a significant inventor in the industry. His innovative methods and collaborative efforts continue to shape the future of semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.