Waiman Ng

Title: An Insight into the Innovations of Waiman Ng

Introduction

Waiman Ng, an innovative inventor based in Los Gatos, California, has contributed significantly to the field of semiconductor technology through his numerous patents. With a total of three patents to his name, Ng has focused on improving measurement techniques and imaging methods that enhance the precision of semiconductor manufacturing processes.

Latest Patents

Among Waiman Ng's latest innovations is a patent titled "Methods of Stabilizing Measurement of ArF Resist in CD-SEM." This invention provides a method for improving the stability of critical dimension scanning electron microscope (CD-SEM) measurements of photoresist, particularly 193 nm photoresist. The method minimizes shrinkage during measurements by exposing the photoresist to a dose of electrons or other stabilizing beams before or during CD measurement.

Another noteworthy patent is regarding a "Scanning Electron Beam Microscope." This invention outlines a method and apparatus for generating an image of a specimen using a scanning electron microscope (SEM). The system features a source unit directing an electron beam towards the specimen, a detector to capture emitted particles, and an image generator that forms the image based on these particles. The image generation process is controlled by the conditions under which the specimen is scanned, allowing for a second image to be generated under varied conditions to study charge control.

Career Highlights

Waiman Ng has had a distinguished career, having worked with prominent companies in the semiconductor industry, including Kla-Tencor Technologies Corporation and Kla Tencor Corporation. His experience in these organizations has played a crucial role in shaping his innovative mindset and technical expertise.

Collaborations

Throughout his career, Ng has collaborated with notable colleagues, including Douglas K. Masnaghetti and Stefano E. Concina. These collaborations have likely fostered an environment of shared knowledge and innovation, enhancing the effectiveness and impact of their collective work in the field of semiconductor technologies.

Conclusion

Waiman Ng's contributions through his patents reflect a deep understanding of semiconductor measurement and imaging technologies. His work continues to influence advancements in the field, making him a prominent figure among inventors in this domain. As technology evolves, innovations like those of Ng will remain critical in pushing the boundaries of what's possible in semiconductor manufacturing.