The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2003
Filed:
Jun. 11, 2001
Douglas K. Masnaghetti, San Jose, CA (US);
Stefano E. Concina, San Jose, CA (US);
Stanley S. Sun, Pleasanton, CA (US);
Waiman Ng, Los Gatos, CA (US);
David L. Adler, San Jose, CA (US);
KLA-Tencor Technologies Corporation, San Jose, CA (US);
Abstract
A method and apparatus for generating an image of a specimen with a scanning electron microscope (SEM) is disclosed. The SEM ( ) has a source unit ( through ) for directing an electron beam ( ) substantially towards a portion of the specimen ( ), a detector ( ) for detecting particles ( ) that are emitted from the specimen ( ), and an image generator ( through ) for generating the image of the specimen ( ) from the emitted particles ( ). The image features are controlled by conditions under which the image is generated. The specimen is scanned under a first set of conditions ( ) to generate a first image during a first image phase ( ). The specimen is then scanned under a second set conditions ( ) during a setup phase ( ). The second set of conditions is selected to control charge on the specimen. The specimen is then scanned under the first set of conditions ( ) to generate a second image during a second image phase ( ). The features of the second image are controlled by the first and second sets of conditions.