Vladimir Volynets

Title: The Innovative Contributions of Vladimir Volynets

Introduction

Vladimir Volynets is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on advanced etching methods and plasma analysis, which are crucial for the fabrication of semiconductor devices.

Latest Patents

Among his latest patents are two notable inventions. The first is an etching method using a remote plasma source (RPS) and a method of fabricating a semiconductor device that incorporates this etching method. This innovative approach involves generating plasma by supplying a process gas to at least one RPS and applying power to it. The method allows for the etching of a first material film, including SiNx, by supplying the plasma along with at least one control gas selected from HBr, HCl, HI, NH, SiH, CHF, and CHF to a process chamber.

The second patent is a pulsed plasma analyzer and method for analyzing the same. This device includes a pulse modulator that controls the off-time of a pulsed plasma containing a target radical. An optical spectrometer measures the optical emissions of the pulsed plasma after the off-time to determine optical emission data. A concentration estimating module then estimates the concentration of the target radical during the off-time based on the initial optical emission value, which changes as a function of the off-time.

Career Highlights

Vladimir Volynets is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His innovative work has positioned him as a key figure in the industry, contributing to advancements that enhance the performance and efficiency of semiconductor devices.

Collaborations

Throughout his career, Volynets has collaborated with notable colleagues, including Sang-jin An and Won-taek Park. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Vladimir Volynets is a distinguished inventor whose contributions to semiconductor technology are noteworthy. His innovative patents and collaborations reflect his commitment to advancing the field. His work continues to influence the development of cutting-edge technologies in the semiconductor industry.