Viren Kalsekar

Title: Innovations of Viren Kalsekar

Introduction

Viren Kalsekar is a prominent inventor based in Sunnyvale, CA, known for his significant contributions to semiconductor processing technology. With a total of 11 patents to his name, Kalsekar has made remarkable advancements in the field, particularly in the development of innovative processing systems.

Latest Patents

Among his latest patents is a "Multiple process semiconductor processing system," which features exemplary substrate processing systems that include a plurality of processing regions. This system incorporates a transfer region housing that is fluidly coupled with the processing regions, along with vertically translatable substrate supports. Additionally, the system includes a transfer apparatus with a rotatable shaft and an exhaust foreline with multiple foreline tails, each connected to a separate processing region. Another notable patent is for "Plasma-enhanced chemical vapor deposition of carbon hard-mask," which outlines a method for depositing a carbon hard-mask material using PECVD. This method involves heating a substrate within a process chamber and producing plasma with a power generator, allowing for the formation of a carbon hard-mask layer at impressive rates.

Career Highlights

Viren Kalsekar has established himself as a key figure in the semiconductor industry through his work at Applied Materials, Inc. His expertise in semiconductor processing has led to numerous innovations that enhance the efficiency and effectiveness of manufacturing processes.

Collaborations

Kalsekar has collaborated with notable colleagues, including Vinay K Prabhakar and Edward P Hammond, contributing to a dynamic work environment that fosters innovation and creativity.

Conclusion

Viren Kalsekar's contributions to semiconductor processing technology exemplify the impact of innovative thinking in the industry. His patents and collaborative efforts continue to shape the future of semiconductor manufacturing.