Vincent Fortin

Title: Vincent Fortin: Innovator in Semiconductor Fabrication

Introduction

Vincent Fortin is a notable inventor based in Santa Clara, CA, with a focus on semiconductor fabrication technologies. He holds a total of 7 patents, showcasing his contributions to the field of electronics and materials science.

Latest Patents

One of his latest patents involves a process for cobalt silicide fabrication using protective titanium. This innovative method begins with the deposition of a cobalt layer on a silicon-containing EPROM region. A titanium layer is then formed over the cobalt layer through ionized physical vapor deposition (IPVD) to protect it from contaminant gases. The cobalt reacts with silicon to create a cobalt silicide layer, after which the titanium layer and any unreacted cobalt are removed. This technique enhances the step coverage, resulting in a superior cobalt silicide layer.

Another significant patent by Fortin focuses on forming conductive layers on insulators through physical vapor deposition. In this process, conductive material is deposited on an insulator, particularly to contact a conductive layer exposed by an opening in the insulator. The initial low wafer bias during deposition prevents the insulator from re-sputtering, thereby improving contact resistance.

Career Highlights

Throughout his career, Vincent Fortin has worked with prominent companies in the semiconductor industry, including Mosel Vitelic Corporation and Promos Technologies, Inc. His work has significantly impacted the development of advanced fabrication techniques.

Collaborations

Vincent has collaborated with notable colleagues such as Kuo-Chun Wu and Kuei-Chang Tsai, contributing to various projects and innovations in semiconductor technology.

Conclusion

Vincent Fortin's contributions to semiconductor fabrication through his innovative patents and collaborations highlight his importance in the field. His work continues to influence advancements in electronics and materials science.