Zurich, Switzerland

Uy-Liem Nguyen

USPTO Granted Patents = 9 

Average Co-Inventor Count = 4.5

ph-index = 3

Forward Citations = 14(Granted Patents)


Location History:

  • Dattwill, CH (2010 - 2011)
  • Baden, CH (2011)
  • Daettwil, CH (2010 - 2012)
  • Zurich, CH (2013 - 2018)

Company Filing History:


Years Active: 2010-2018

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9 patents (USPTO):

Title: Innovator Spotlight: Uy-Liem Nguyen

Introduction

Uy-Liem Nguyen is a prominent inventor based in Zurich, Switzerland. With an impressive portfolio of 9 patents, he has made significant contributions to the field of optical imaging devices, particularly in microlithography for semiconductor components.

Latest Patents

Among his latest inventions is the "Diaphragm Changing Device." This invention pertains to an optical imaging device, specifically an objective for extreme ultraviolet lithography (EUVL). It features a beam path that incorporates numerous optical elements along with a diaphragm device. This device allows for an adjustable diaphragm opening shape, enhancing the performance of the optical imaging systems used in semiconductor production.

Another notable patent is the "Optical Aperture Device," which includes an aperture device supported by a structure. This innovative module defines an aperture edge and an aperture plane that work collectively to manage the light beam geometries along an optical axis. What sets this invention apart is its ability to maintain the relative positioning and geometry of the aperture edge despite fluctuations in temperature distribution, thus ensuring consistent performance.

Career Highlights

Uy-Liem has built a robust career in leading companies such as Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His work in these prestigious organizations has been instrumental in advancing optical technologies, particularly in precision instruments for lithography.

Collaborations

Throughout his career, Uy-Liem has collaborated with notable figures in the field, including Hermann Bieg and Stefan Xalter. Their joint efforts have contributed to the development of innovative solutions that push the boundaries of optical engineering.

Conclusion

Uy-Liem Nguyen is a visionary inventor whose advancements in optical imaging devices are shaping the future of semiconductor technology. His dedication to innovation and collaboration within the optical community demonstrates his commitment to enhancing precision and efficiency in the industry.

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