The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Jul. 02, 2004
Bernhard Gellrich, Aalen, DE;
Thomas Bischoff, Aalen, DE;
Hermann Bieg, Aalen, DE;
Martin Huber, Unterentfelden, CH;
Francois Henzelin, Boncourt, CH;
Gerhard Szekely, Wetzikon, CH;
Uy-liem Nguyen, Baden, CH;
Martin E. Humphries, Bristol, GB;
Bernhard Gellrich, Aalen, DE;
Thomas Bischoff, Aalen, DE;
Hermann Bieg, Aalen, DE;
Martin Huber, Unterentfelden, CH;
Francois Henzelin, Boncourt, CH;
Gerhard Szekely, Wetzikon, CH;
Uy-Liem Nguyen, Baden, CH;
Martin E. Humphries, Bristol, GB;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical imaging device (PL), in particular an objective for semiconductor lithography, is provided with at least one system diaphragm. The system diaphragm comprises a multiplicity of mobile plates, which are rotatably mounted. The plates have a spherical curvature.