The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
Feb. 04, 2010
Hermann Bieg, Huettlingen, DE;
Marcus Will, Neu-Ulm, DE;
Thomas Bischoff, Aalen, DE;
Yim-bun Patrick Kwan, Aalen, DE;
Uy-liem Nguyen, Daettwil, CH;
Stefan Xalter, Oberkochen, DE;
Michael Muehlbeyer, Aalen, DE;
Hermann Bieg, Huettlingen, DE;
Marcus Will, Neu-Ulm, DE;
Thomas Bischoff, Aalen, DE;
Yim-Bun Patrick Kwan, Aalen, DE;
Uy-Liem Nguyen, Daettwil, CH;
Stefan Xalter, Oberkochen, DE;
Michael Muehlbeyer, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The invention relates to an optical imaging device, in particular an objectivefor microlithography in the field of EUVL for producing semiconductor components, having a beam path, a plurality of optical elementsand a diaphragm devicewith an adjustable diaphragm opening shape. The diaphragm device has a diaphragm storewith a plurality of different diaphragm openingswith fixed shapes in each case, which can be introduced into the beam path