Company Filing History:
5 out of 461 
2 out of 83 
2 out of 1,409 
Years Active: 2004-2015
Title: Uwe Schellhorn: Innovator in Beam Control and Metrology Systems
Introduction
Uwe Schellhorn is a notable inventor based in Aalen, Germany. He has made significant contributions to the fields of beam control and metrology systems. With a total of 9 patents to his name, Schellhorn's work has advanced the technology used in illumination and measurement systems.
Latest Patents
One of his latest patents is a beam control apparatus for an illumination beam. This apparatus includes an imaging illumination optical unit assembly that images an intermediate focus of the illumination beam onto an object field. A control component influences the beam path and is displaceable by at least one displacement actuator. The position sensor device detects the position of the intermediate focus, while the control device calculates control signals for the displacement actuator. This innovation allows for well-controllable illumination with a simple construction.
Another significant patent is a method for calibrating a specimen stage of a metrology system. In this method, a specimen with multiple marks is positioned in various calibration positions. Each mark is measured using an optical system, and a model is established to describe positioning errors. The calibration parameters are determined based on the model, taking into account systematic measurement errors.
Career Highlights
Throughout his career, Uwe Schellhorn has worked with prominent companies such as Carl Zeiss SMT AG and Carl Zeiss SMS Ltd. His experience in these organizations has contributed to his expertise in optical systems and metrology.
Collaborations
Some of his notable coworkers include Joachim Stuehler and Ulrich Wegmann. Their collaboration has likely fostered innovation and development in their respective fields.
Conclusion
Uwe Schellhorn's contributions to beam control and metrology systems demonstrate his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology in illumination and measurement, making a lasting impact in these fields.