The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Mar. 18, 2010
Alexander Huebel, Aalen, DE;
Matthias Manger, Aalen-Unterkochen, DE;
Gerd Klose, Oberkochen, DE;
Uwe Schellhorn, Aalen, DE;
Michael Arnz, Oberkochen, DE;
Alexander Huebel, Aalen, DE;
Matthias Manger, Aalen-Unterkochen, DE;
Gerd Klose, Oberkochen, DE;
Uwe Schellhorn, Aalen, DE;
Michael Arnz, Oberkochen, DE;
Carl Zeiss SMS GmbH, Jena, DE;
Abstract
A method for calibrating a specimen stage of a metrology system is provided, in which a specimen that has multiple marks is positioned successively in different calibration positions, each mark is positioned in the photography range of an optical system by means of the specimen stage in each calibration position of the specimen, and the mark position is measured using the optical system. A model is set up that describes positioning errors of the specimen stage using a system of functions having calibration parameters to be determined. The model takes into consideration at least one systematic measurement error that occurs during the measurement of the mark positions. The values of the calibration parameters are determined based on the model with consideration of the measured mark positions.