Taipei, Taiwan

Tzu-Heng Wu


Average Co-Inventor Count = 5.2

ph-index = 2

Forward Citations = 8(Granted Patents)


Location History:

  • New Tapei, TW (2016)
  • New Taipei, TW (2016 - 2021)

Company Filing History:


Years Active: 2016-2021

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11 patents (USPTO):

Title: Tzu-Heng Wu: Innovator in Micro-Electro-Mechanical Systems

Introduction

Tzu-Heng Wu is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of micro-electro-mechanical systems (MEMS) and holds a total of 11 patents. His innovative work has advanced the technology used in integrated microphone devices and semiconductor structures.

Latest Patents

One of Tzu-Heng Wu's latest patents is for an integrated microphone device and its manufacturing method. This device includes a substrate with an aperture that allows acoustic pressure to pass through, a plate, and a membrane that moves in response to acoustic pressure. The membrane features a vent valve with a variable open area, enhancing its functionality. Another notable patent involves a method of fabricating a semiconductor structure. This method includes forming a recess in a first substrate, bonding a MEMS substrate, and creating an anti-stiction layer, which is crucial for the performance of MEMS devices.

Career Highlights

Tzu-Heng Wu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to push the boundaries of technology. His work has not only contributed to the advancement of MEMS but has also positioned him as a key player in the semiconductor industry.

Collaborations

Tzu-Heng Wu has collaborated with notable colleagues, including Chun-Ren Cheng and Chun-Wen Cheng. These partnerships have fostered an environment of innovation and have led to the development of cutting-edge technologies.

Conclusion

Tzu-Heng Wu's contributions to the field of micro-electro-mechanical systems and semiconductor technology are noteworthy. His innovative patents and collaborations highlight his role as a leading inventor in Taiwan's technology landscape.

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